Keithley 590-100K-1M
C V Analyzer
Description
This C V Analyzer measures capacitance versus voltage (C V) and capacitance versus time (C t) characteristics of semiconductor devices.
Unlike other capacitance measurement instruments, the 590 has been tailored to the requirements of semiconductor device testing.
High frequency (100KHz or 1MHz) C V measurements are commonly applied to test p to n or schottky junction and Metal Insulator Semiconductor (MIS) devices for device characterization and process control.
Key Points
0.1fF sensitivity to test small devices
Ranges up to 20nF (at 100KHz, using 5904 adapter) to test large, leaky, or forward biased devices
Test signal voltage of 15mV rms
Choice of 1MHz frequency for compliance with existing test standards or 100KHz for improved resolution, range, and accuracy
Selectable measurement rate (1 to 1000 readings per second) and filter to optimize speed/resolution trade offs
Sophisticated correction for transmission line errors due to device connections
Built in test setup and correction value storage, analysis, and plotter control to minimize computer programming
Specifications
Frequency range: 0Hz to 60Hz
Sensitivity: 0.1fF
Test signal voltage: 15mV rms
