Keithley 7072
Semiconductor Matrix Card
Description
This card is designed specifically to handle low level and high impedance measurements encountered in semiconductor parametric tests on wafers and devices.
This unique design provides two low current circuits with specified 1pA maximum offset current for sensitive sub-picoamp measurement resolution, and two C-V paths for measurement of Capacitance Voltage characteristics from DC to 1MHz.
<
p>Four additional high quality signal paths with <20pA offset current provide for general purpose signal switching up to 100nA or 200V.
Key Points
Two sub-picoamp current paths
Two DC to 1MHz C-V paths
Four high isolation signal paths
3 lug triaxial connection
Specifications
Matrix Configuration: 8 rows by 12 columns
Connector Type: 3 lug triaxial
Maximum Signal Level: 200V, 1A carry/0.5A switched, 10VA peak (resistive load)
Common Mode Voltage: 200V
Cold Switching: 107 closures
Maximum Signal Level: 105 closures
Path Resistance: <1Ω initial
<
p>Contact Potential: <40µV per crosspoint
<
p>Relay Setting Time:: <15ms
Insertion Loss: 0.1dB typical
Operating: 0° to 50°C, up to 35°C at 70% R.H
Storage: –25° to +65°C
