Keithley 590
CV Analyzer
Description
This CV Analyzer measures capacitance versus voltage and capacitance versus time characteristics of semiconductor devices.
Unlike other capacitance measurement instruments, this has been tailored to the requirements of semiconductor device testing.
High frequency CV measurements are commonly applied to test pn or schottky junction for device characterization and process control.
CV results are highly correlated with performance parameters of functional devices such as FETs , memory cells, CCDs, and isolation structures.
Key Points
100KHz, 1MHz or 100KHz/1MHz test frequencies
Measures capacitance and conductance
Internal correction for errors due to cables, connections, and switching paths
Built in test setup and correction value storage, analysis, and plotter control to minimize computer programming
Specifications
Internal bias source output: -20V to +20V in 5mV steps
Accuracy: ±0.05% setting + 10mV
DC output resistance: 5ohms
Maximum output current: ±50mA
<
p>Setting time: <1ms
